reactive sputtering

Basic Concepts of Reactive Sputtering

Why is Reactive Sputtering important? –Bill Sproul, the inventor of mass spectrometer based reactive sputtering process control technology, stated in his 2005 review paper, “the use of reactive sputtering has proliferated, particularly over the past decade. It is used extensively by manufacturers of coated architectural glass, roll or web coatings, coated cutting tools, optical coatings, decorative and functional coatings for plumbing and hardware items, microelectronic devices, automotive windshields and mirrors, micro-electro-mechanical systems (MEMS) devices...”.

This article is the first freely accessible online introduction to the basic concepts of Reactive Sputtering - a technology that had a transformative effect on magnetron sputtering-based compound (e.g. Al2O3, SiO2) deposition.

As you read this article you will learn about what Reactive Sputtering is, the most important principles, technical and technological problems, solutions and industrial applications. You will also be introduced to main coating production system types currently used in the market.

Dr Martynas Audronis

Dr Martynas Audronis obtained his PhD in Surface Engineering in 2007 from the University of Sheffield where he subsequently worked as a Research Associate at the Research Centre for Surface Engineering. He worked for e2v technologies plc in Chelmsford, a semiconductor manufacturer, in 2008. In 2009 he joined Gencoa Ltd, a sputtering components manufacturer. In 2012 Dr Audronis went back to the University of Sheffield where he focused on developing a reactive EB evaporation technology. In 2013 he founded Nova Fabrica Ltd.