reactive gas control

FloTron - reactive gas control and plasma monitoring system

The FloTron™ is a high-speed active feedback process monitoring and control system designed for real time, in-situ control of reactive sputtering, ion & plasma processing and reactive EB evaporation processes. The FloTron is a complete, compact, flexible, convenient to use and economical solution, which can be readily integrated into new as well as existing processes. FloTron™ uses proprietary fast control algorithms that most control engineers will be familiar with, thus eliminating or reducing significantly the learning curve.

FloTron X - reactive gas control and plasma monitoring system

The FloTron™ is a high-speed active feedback process monitoring and control system designed for real time, in-situ control of reactive sputtering, ion & plasma processing and reactive EB evaporation processes. The FloTron is a complete, compact, flexible, convenient to use and economical solution, which can be readily integrated into new as well as existing processes. FloTron™ uses proprietary fast control algorithms that most control engineers will be familiar with, thus eliminating or reducing significantly the learning curve.